Modeling the extraction of sputtered species out of a pulsed hollow cathode

by Mohammad Hasan

Institution: KTH Royal Institute of Technology
Year: 2011
Keywords: Natural Sciences; Physical Sciences; Fusion, Plasma and Space Physics; Naturvetenskap; Fysik; Fusion, plasma och rymdfysik; Physics, Chemistry, Mathematics; fysik/kemi/matematik; Master of Science - Electrophysics; Teknologie masterexamen - Elektrofysik
Record ID: 1354942
Full text PDF: http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91538