Design and Implementation of DC Magnetron Sputter Deposition System and Hall Effect System Via LabView

by Jason Wright

Institution: Ohio University
Department: Electrical Engineering (Engineering and Technology)
Degree: MS
Year: 2015
Keywords: Electrical Engineering; Sputtering; Hall Effect; LabView
Record ID: 2063352
Full text PDF: http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1417605695


Integrated software controlled systems are necessary for accelerating academic research and process development. This allows a tremendous increase with the accuracy, productivity and reliability levels in instrument operation and research development. Software controlled fabrication equipment and characterization systems allow researchers and process engineers a wide range of advantages over manual analog controlled systems of the past including improving safety, reducing operator errors, increasing the rate of data collection/monitoring capacity and ease of use. The focus of this thesis is the software development and accompanying hardware implementation for two systems: DC Sputter system and Hall Effect system. The DC Sputter system, which was re-designed ground-up, will be compatible with operation in two modes. The first operational mode is completely automated, with simple push button commands for execution of programmed deposition routines. In contrast, the second operational mode allows the full manual control of the system, digitally, over a touch screen interface, thus significantly improving productivity and user friendliness. In addition to a LabView interface implemented, the DC Sputter system also has custom circuitry and hardware interlocks in parallel with the advance software controls. The Hall Effect system differs slightly, in the software design; it has only one mode of operation that is fully automated. The Hall Effect system, built from the ground up, has a custom test bed and I/O connection platform developed to allow for testing of varied sized samples. Finally, each system has been tested for proper functionality to confirm reliable system operation.